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The Mechanisms of Iron Gettering in Silicon by Boron Ion-Implantation

著者名:
Benton, J.L.
Stolk, P.A.
Eaglesham, D.J.
Jacobson, D.C.
Cheng, J.Y.
Poate, J.M.
Myers, S.M.
Haynes, T.E
さらに 3 件
掲載資料名:
ULSI science and technology, 1995 : proceedings of the Fifth International Symposium on Ultra Large Scale Integration Science and Technology
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
95-5
発行年:
1995
開始ページ:
153
終了ページ:
160
出版情報:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566770996 [1566770998]
言語:
英語
請求記号:
E23400/952065
資料種別:
国際会議録

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