Blank Cover Image

Dopant Diffusion in Si(100) Doping Superlattices During Thermal Nitridation and Vacancy Assisted Sb Precipitation

著者名:
Mogi, T.K.
Gossmann, H-J.
Eaglesham, D.J.
Rafferty, C.S.
Lufiman, H.S.
Unterwald, F.C.
Boone, T.
Poate, J.M.
Thompson, M.O.
さらに 4 件
掲載資料名:
ULSI science and technology, 1995 : proceedings of the Fifth International Symposium on Ultra Large Scale Integration Science and Technology
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
95-5
発行年:
1995
開始ページ:
145
終了ページ:
152
出版情報:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566770996 [1566770998]
言語:
英語
請求記号:
E23400/952065
資料種別:
国際会議録

類似資料:

Mogi, Toshiharu K., Gossmann, H.-J., Rafferty, C. S., Luftman, H. S., Unterwald, F. C., Boone, T., Thompson, Michael O., …

MRS - Materials Research Society

Pelaz, L., Gilmer, G. H., Jaraiz, M., Gossmann, H-J., Rafferty, C. S., Eaglesham, D. J., Poate, J. M.

MRS - Materials Research Society

Gossmann, H.-J., Mogi, T.K., Rafferty, C.S., Stolk, P.A., Eaglesham, D.J., Luftman, H.S., Unterwald, F.C., Boone, T., …

Electrochemical Society

Stolk, P. A., Gossmann, H.-J., Eaglesham, D. J., Jacobson, D. C., Luftman, H. S., Poate, J. M.

MRS - Materials Research Society

Gossmann, H. J., Rafferty, C. S., Stolk, P. A., Eaglesham, D. J., Gilmer, G. H., Poate, J. M., Vuong, H.-H., Mogi, T. …

MRS - Materials Research Society

Venezia, V.C., Eaglesham, D.J., Haynes, T.E., Agarwal, A., Jacobson, D.C., Gossmann, H.-J., Friessnegg, T., Nielsen, B.

Electrochemical Society

Vuong, H-H., Gossmann, H.-J., Rafferty, C.S., Luftman, H.S., Unterwald, F.C., Jacobson, D.C., Ahrens, R.E, Boone, T., …

Electrochemical Society

Gibson, J.M., McDonald, M.L., Unterwald, F.C., Gossmann, H.-J., Bean, J.C., Tung, R.T.

Materials Research Society

5 国際会議録 Si MBE ON H-PASSIVATED Si(100)

Eaglesham, D.J., Unterwald, F.C., Luftman, H.

Materials Research Society

Hong, Q.Z., Revesc, P., Yu, A..J., Mayer, J.W., Poate, J.M., Bean, J.C., Eaglesham, D.J.

Materials Research Society

Venezia, V. C., Haynes, T. E., Agarwal, A., Gossmann, H-J., Eaglesham, D. J.

MRS - Materials Research Society

Jacobson, D. C., Poate, J. M., Higashi, G. S., Boone, T., Eaglesham, D. J., Hockett, Richard

MRS - Materials Research Society

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12