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ENHANCED DEPOSITION RATE OF CVD DIAMOND IN A DC ARCJET WiTH A SECONDARY DISCHARGE

著者名:
掲載資料名:
Proceedings of the Fourth International Symposium on Diamond Materials
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
95-4
発行年:
1995
開始ページ:
206
終了ページ:
211
総ページ数:
6
出版情報:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566770989 [156677098X]
言語:
英語
請求記号:
E23400/952064
資料種別:
国際会議録

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