Sensor Development and Process Control for Chemical-Mechanical Planarization of Multilevel Interconnect Devices
- 著者名:
- 掲載資料名:
- Proceedings of the Symposium on Process control, Diagnostics, and Modeling in Semiconductor Manufacturing
- シリーズ名:
- Electrochemical Society Proceedings Series
- シリーズ巻号:
- 95-2
- 発行年:
- 1995
- 開始ページ:
- 87
- 終了ページ:
- 96
- 総ページ数:
- 10
- 出版情報:
- Pennington, NJ: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566770965 [1566770963]
- 言語:
- 英語
- 請求記号:
- E23400/952062
- 資料種別:
- 国際会議録
類似資料:
Electrochemical Society |
Materials Research Society |
MRS - Materials Research Society |
Materials Research Society |
Electrochemical Society |
9
国際会議録
Dielectric CMP Planarization Considerations for Deep Sub-Micron Multilevel Interconnect Processes
Electrochemical Society |
Electrochemical Society |
SPIE - The International Society for Optical Engineering |
Electrochemical Society |
MRS - Materials Research Society |
Electrochemical Society |
Materials Research Society |