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CPL mask technology for sub-100-nm contact hole imaging

著者名:
Kasprowicz, B.S. ( Photronics, Inc. (USA) )
Conley, W.E. ( Motorola, Inc. (USA) )
Litt, L.C. ( Motorola, Inc. (USA) )
Van Den Broeke, D.J. ( ASML MaskTools, Inc. (USA) )
Montgomery, P.K. ( Motorola, Inc. (USA) )
Socha, R.J. ( Motorola, Inc. (USA) )
Wu, W. ( Motorola, Inc. (USA) )
Lucas, K.D. ( Motorola, Inc. (USA) )
Roman, B.J. ( Motorola, Inc. (USA) )
Chen, J.F. ( ASML MaskTools, Inc. (USA) )
Wampler, K.E. ( ASML MaskTools, Inc. (USA) )
Laidig, T.L. ( ASML MaskTools, Inc. (USA) )
Progler, C.J. ( Photronics, Inc. (USA) )
Hathorn, M.E. ( Rochester Institute of Technology (USA) )
さらに 9 件
掲載資料名:
Photomask and Next-Generation Lithography Mask Technology XI
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
5446
発行年:
2004
開始ページ:
624
終了ページ:
631
総ページ数:
8
出版情報:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819453693 [0819453692]
言語:
英語
請求記号:
P63600/5446.2
資料種別:
国際会議録

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