Through-pitch low-k1 contact hole imaging with CPL technology
- 著者名:
Wiaux, V. ( IMEC (Belgium) ) Bekaert, J. ( IMEC (Belgium) ) Chen, J.F. ( ASML MaskTools, Inc. (USA) ) Hsu, S.D. ( ASML MaskTools, Inc. (USA) ) Ronse, K.G. ( IMEC (Belgium) ) Socha, R.J. ( ASML Technology Development Ctr. (USA) ) Vandenberghe, G. ( IMEC (Belgium) ) Van Den Broeke, D.J. ( ASML MaskTools, Inc. (USA) ) - 掲載資料名:
- Photomask and Next-Generation Lithography Mask Technology XI
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 5446
- 発行年:
- 2004
- 開始ページ:
- 585
- 終了ページ:
- 594
- 総ページ数:
- 10
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819453693 [0819453692]
- 言語:
- 英語
- 請求記号:
- P63600/5446.2
- 資料種別:
- 国際会議録
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