Contact hole reticle optimization by using interference mapping lithography (IML)
- 著者名:
Socha, R.J. ( ASML MaskTools, Inc. (USA) ) Van Den Broeke, D.J. ( ASML MaskTools, Inc. (USA) ) Hsu, S.D. ( ASML MaskTools, Inc. (USA) ) Chen, J.F. ( ASML MaskTools, Inc. (USA) ) Laidig, T.L. ( ASML MaskTools, Inc. (USA) ) Corcoran, N.P. ( ASML MaskTools, Inc. (USA) ) Hollerbach, U. ( ASML MaskTools, Inc. (USA) ) Wampler, K.E. ( ASML MaskTools, Inc. (USA) ) Shi, X. ( ASML MaskTools, Inc. (USA) ) Conley, W.E. ( Motorola, Inc. (USA) ) - 掲載資料名:
- Photomask and Next-Generation Lithography Mask Technology XI
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 5446
- 発行年:
- 2004
- 開始ページ:
- 516
- 終了ページ:
- 534
- 総ページ数:
- 19
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819453693 [0819453692]
- 言語:
- 英語
- 請求記号:
- P63600/5446.2
- 資料種別:
- 国際会議録
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Model-based scattering bars implementation for 65nm and 45nm nodes using IML technology [5853-50]
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