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Double dipole lithography for 65-nm node and beyond: a technology readiness review

著者名:
Hsu, S.D. ( ASML MaskTools, Inc. (USA) )
Eurlings, M. ( ASML Netherlands B.V. (Netherlands) )
Hendrickx, E. ( IMEC (Belgium) )
Van Den Broeke, D.J. ( ASML MaskTools, Inc. (USA) )
Chiou, T.-B. ( ASML Technology Development Ctr. Asia (Taiwan) )
Chen, J.F. ( ASML MaskTools, Inc. (USA) )
Laidig, T.L. ( ASML MaskTools, Inc. (USA) )
Shi, X. ( ASML MaskTools, Inc. (USA) )
Finders, J. ( ASML Netherlands B.V. (Netherlands) )
さらに 4 件
掲載資料名:
Photomask and Next-Generation Lithography Mask Technology XI
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
5446
発行年:
2004
開始ページ:
481
終了ページ:
498
総ページ数:
18
出版情報:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819453693 [0819453692]
言語:
英語
請求記号:
P63600/5446.2
資料種別:
国際会議録

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