Double dipole lithography for 65-nm node and beyond: a technology readiness review
- 著者名:
Hsu, S.D. ( ASML MaskTools, Inc. (USA) ) Eurlings, M. ( ASML Netherlands B.V. (Netherlands) ) Hendrickx, E. ( IMEC (Belgium) ) Van Den Broeke, D.J. ( ASML MaskTools, Inc. (USA) ) Chiou, T.-B. ( ASML Technology Development Ctr. Asia (Taiwan) ) Chen, J.F. ( ASML MaskTools, Inc. (USA) ) Laidig, T.L. ( ASML MaskTools, Inc. (USA) ) Shi, X. ( ASML MaskTools, Inc. (USA) ) Finders, J. ( ASML Netherlands B.V. (Netherlands) ) - 掲載資料名:
- Photomask and Next-Generation Lithography Mask Technology XI
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 5446
- 発行年:
- 2004
- 開始ページ:
- 481
- 終了ページ:
- 498
- 総ページ数:
- 18
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819453693 [0819453692]
- 言語:
- 英語
- 請求記号:
- P63600/5446.2
- 資料種別:
- 国際会議録
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