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Demonstration of damage-free mask repair using electron beam-induced processes

著者名:
Liang, T. ( Intel Corp. (USA) )
Stivers, A.R. ( Intel Corp. (USA) )
Penn, M. ( Intel Corp. (USA) )
Bald, D. ( Intel Corp. (USA) )
Sethi, C. ( Intel Corp. (USA) )
Boegli, V. ( NaWoTec GmbH (Germany) )
Budach, M. ( NaWoTec GmbH (Germany) )
Edinger, K. ( NaWoTec GmbH (Germany) )
Spies, P. ( NaWoTec GmbH (Germany) )
さらに 4 件
掲載資料名:
Photomask and Next-Generation Lithography Mask Technology XI
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
5446
発行年:
2004
開始ページ:
291
終了ページ:
300
総ページ数:
10
出版情報:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819453693 [0819453692]
言語:
英語
請求記号:
P63600/5446.1
資料種別:
国際会議録

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