FET on ultrathin SOI (fabrication and research)
- 著者名:
Naumova, O.V. ( Institute of Semiconductor Physics (Russia) ) Antonova, I.V. ( Institute of Semiconductor Physics (Russia) ) Popov, V.P. ( Institute of Semiconductor Physics (Russia) ) Nastaushev, Y.V. ( Institute of Semiconductor Physics (Russia) ) Gavrilova, T.A. ( Institute of Semiconductor Physics (Russia) ) Kachanova, M.M. ( Institute of Semiconductor Physics (Russia) ) Litvin, L.V. ( Institute of Semiconductor Physics (Russia) ) Aseev, A.L. ( Institute of Semiconductor Physics (Russia) ) - 掲載資料名:
- Micro- and Nanoelectronics 2003
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 5401
- 発行年:
- 2004
- 開始ページ:
- 323
- 終了ページ:
- 331
- 総ページ数:
- 9
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819453242 [0819453242]
- 言語:
- 英語
- 請求記号:
- P63600/5401
- 資料種別:
- 国際会議録
類似資料:
Electrochemical Society | |
Kluwer Academic Publishers |
8
国際会議録
Defects and their electronic properties in high-pressure-annealed SOI structures sliced by hydrogen
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11
国際会議録
Modification of Si/SiO2 interface in SOI structures by hydrogen implantation: radiation tolerance
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SPIE-The International Society for Optical Engineering |
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