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Interferometers with diffraction on dot aperture for testing of shape errors of precise surfaces

著者名:
  • Kirillovsky, V.K. ( St. Petersburg State Institute of Fine Mechanics and Optics (Russia) )
  • Voznesensky, N.B. ( St. Petersburg State Institute of Fine Mechanics and Optics (Russia) )
  • Troukhine, M.M. ( St. Petersburg State Institute of Fine Mechanics and Optics (Russia) )
  • Lee, K.-H. ( Korea Electrotechnology Research Institute (South Korea) )
掲載資料名:
Laser-Assisted Micro- and Nanotechnologies 2003
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
5399
発行年:
2004
開始ページ:
77
終了ページ:
87
総ページ数:
11
出版情報:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819453228 [0819453226]
言語:
英語
請求記号:
P63600/5399
資料種別:
国際会議録

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