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Ultrasharp high-aspect-ratio probe array for SECM and AFM Analysis

著者名:
掲載資料名:
Smart structures and materials 2004 : smart electronics, MEMS, BioMEMS, and nanotechnology : 15-18 March 2004, San Diego, California, USA
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
5389
発行年:
2004
開始ページ:
431
終了ページ:
442
総ページ数:
12
出版情報:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819453068 [0819453064]
言語:
英語
請求記号:
P63600/5389
資料種別:
国際会議録

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