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Experimental verification of a model-based decomposition method for double dipole lithography

著者名:
Eurlings, M. ( ASML (Netherlands) )
Hsu, S.D. ( ASML (USA) )
Hendrickx, E. ( IMEC (Belgium) )
op 't Root, W. ( Technische Univ. Eindhoven (Netherlands) )
Laidig, T.L. ( ASML (USA) )
Chiou, T.-B. ( ASML (Taiwan) )
Chen, A. ( ASML (Taiwan) )
Chen, F. ( ASML (USA) )
Vandenberghe, G. ( IMEC (Belgium) )
Finders, J. ( ASML (Netherlands) )
さらに 5 件
掲載資料名:
Optical Microlithography XVII
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
5377
発行年:
2004
開始ページ:
1225
終了ページ:
1236
総ページ数:
12
出版情報:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819452900 [0819452904]
言語:
英語
請求記号:
P63600/5377.2
資料種別:
国際会議録

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