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Phenomena and OPC solution of ripple patterns for 65-nm node

著者名:
Lai, C.-M. ( Taiwan Semiconductor Manufacturing Co., Ltd. (Taiwan) )
Ho, J.-S. ( Taiwan Semiconductor Manufacturing Co., Ltd. (Taiwan) )
Lai, C.-W. ( Taiwan Semiconductor Manufacturing Co., Ltd. (Taiwan) )
Tsai, C.-K. ( Taiwan Semiconductor Manufacturing Co., Ltd. (Taiwan) )
Tsay, C.-S. ( Taiwan Semiconductor Manufacturing Co., Ltd. (Taiwan) )
Chen, J.-H. ( Taiwan Semiconductor Manufacturing Co., Ltd. (Taiwan) )
Liu, R.-G. ( Taiwan Semiconductor Manufacturing Co., Ltd. (Taiwan) )
Ku, Y.C. ( Taiwan Semiconductor Manufacturing Co., Ltd. (Taiwan) )
Lin, B.-J. ( Taiwan Semiconductor Manufacturing Co., Ltd. (Taiwan) )
さらに 4 件
掲載資料名:
Optical Microlithography XVII
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
5377
発行年:
2004
開始ページ:
1165
終了ページ:
1171
総ページ数:
7
出版情報:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819452900 [0819452904]
言語:
英語
請求記号:
P63600/5377.2
資料種別:
国際会議録

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