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BEOL lithography for early development at the 65-nm node

著者名:
DellaGuardia, R. ( IBM Microelectronics Div. (USA) )
Kwong, R.W. ( IBM Microelectronics Div. (USA) )
Li, W. ( IBM Microelectronics Div. (USA) )
Lawson, P. ( IBM Microelectronics Div. (USA) )
Burkhardt, M. ( IBM Microelectronics Div. (USA) )
Grauer, I.C. ( IBM Microelectronics Div. (USA) )
Wu, Q. ( IBM Microelectronics Div. (USA) )
Angyal, M. ( IBM Microelectronics Div. (USA) )
Hichri, H. ( IBM Microelectronics Div. (USA) )
Melville, I. ( IBM Microelectronics Div. (USA) )
Kumar, K. ( IBM Microelectronics Div. (USA) )
Lin, Y. ( IBM Microelectronics Div. (USA) )
Holmes, S.J. ( IBM Microelectronics Div. (USA) )
Varanasi, R. ( IBM Microelectronics Div. (USA) )
Spooner, T. ( IBM Microelectronics Div. (USA) )
McHerron, D. ( IBM Microelectronics Div. (USA) )
さらに 11 件
掲載資料名:
Optical Microlithography XVII
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
5377
発行年:
2004
開始ページ:
980
終了ページ:
987
総ページ数:
8
出版情報:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819452900 [0819452904]
言語:
英語
請求記号:
P63600/5377.2
資料種別:
国際会議録

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