Blank Cover Image

Experimental investigation of fabrication process-, transportation-, storage, and handling-induced contamination of 157-nm reticles and vacuum UV cleaning

著者名:
Okoroanyanwu, U. ( Advanced Micro Devices, Inc. (USA) and IMEC (Belgium) )
Stepanenko, N. ( Infineon Technologies AG (Germany) and IMEC (Belgium) )
Vereecke, G. ( IMEC (Belgium) )
Eliat, A. ( IMEC (Belgium) )
Kocsis, M.K. ( IMEC (Belgium) and Intel Corp. (USA) )
Kang, Y.S. ( IMEC (Belgium) and Samsung Electronics (South Korea) )
Jonckheere, R.M. ( IMEC (Belgium) )
Conard, T. ( IMEC (Belgium) )
Ronse, K.G. ( IMEC (Belgium) )
さらに 4 件
掲載資料名:
Optical Microlithography XVII
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
5377
発行年:
2004
開始ページ:
487
終了ページ:
503
総ページ数:
17
出版情報:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819452900 [0819452904]
言語:
英語
請求記号:
P63600/5377.1
資料種別:
国際会議録

類似資料:

Wells, G., Hermans, J., Watso, R., Kang, Y.-S., Morton, R., Kocsis, M.K., Okoroanyanwu, U., De Bisschop, P., Stepanenko, …

SPIE - The International Society of Optical Engineering

Bloomstein,T.M., Liberman,V., Rothschild,M., Efremow Jr.,N.N., Hardy,D.E., Palmacci,S.T.

SPIE-The International Society for Optical Engineering

Okoroanyanwu, U., Gronheid, R., Coenen, J., Hermans, J., Ronse, K.G.

SPIE - The International Society of Optical Engineering

Thomas Marschner, Ivan K. Pollentier, Goedele Potoms, Rik M. Jonckheere, Kurt G. Ronse

SPIE - The International Society of Optical Engineering

Verhaegen, S., Vandenberghe, G., Jonckheere, R.M., Ronse, K.G.

SPIE-The International Society for Optical Engineering

Maurer, W., Wiaux, V., Jonckheere, R.M., Philipsen, V., Hoffmann, T., Verhaegen, S., Ronse, K.G., England, J.G., Howard, …

SPIE-The International Society for Optical Engineering

Ronse, K.G., Bisschop, P.D., Eliat, A., Goethals, A.M., Hermans, J., Jonckheere, R., Heuvel, D.V.D., Roey, F.V., Beckx, …

SPIE-The International Society for Optical Engineering

R. Jonckheere, G. F. Lorusso, A. M. Goethals, J. Hermans, B. Baudemprez, A. Myers, I. Kim, A. Niroomand, F. Iwamoto, N. …

SPIE - The International Society of Optical Engineering

Jonckheere,R.M., Vandenberghe,G.N., Wiaux,V., Verhaegen,S., Ronse,K.

SPIE-The International Society for Optical Engineering

R. Jonckheere, G. F. Lorusso, A. Goethals, K. Ronse, J. Hermans, R. D. Ruyter

SPIE - The International Society of Optical Engineering

Vandenberghe,G.N., Jaenen,P., Jonckheere,R.M., Ronse,K., Toublan,O.

SPIE-The International Society for Optical Engineering

Hourd, A.C., Grimshaw, A., Scheuring, G., Gittinger, C., Doebereiner, S., Hillmann, F., Brueck, H.-J., Hartmann, H., …

SPIE-The International Society for Optical Engineering

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12