Contact hole reticle optimization by using interference mapping lithography (IML)
- 著者名:
Socha, R.J. ( ASML (USA) and Motorola (USA) ) Van Den Broeke, D.J. ( ASML (USA) and Motorola (USA) ) Hsu, S.D. ( ASML (USA) and Motorola (USA) ) Chen, J.F. ( ASML (USA) and Motorola (USA) ) Laidig, T.L. ( ASML (USA) and Motorola (USA) ) Corcoran, N. ( ASML (USA) and Motorola (USA) ) Hollerbach, U. ( ASML (USA) and Motorola (USA) ) Wampler, K.E. ( ASML (USA) and Motorola (USA) ) Shi, X. ( ASML (USA) and Motorola (USA) ) Conley, W. ( ASML (USA) and Motorola (USA) ) - 掲載資料名:
- Optical Microlithography XVII
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 5377
- 発行年:
- 2004
- 開始ページ:
- 222
- 終了ページ:
- 240
- 総ページ数:
- 19
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819452900 [0819452904]
- 言語:
- 英語
- 請求記号:
- P63600/5377.1
- 資料種別:
- 国際会議録
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