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Contact hole reticle optimization by using interference mapping lithography (IML)

著者名:
Socha, R.J. ( ASML (USA) and Motorola (USA) )
Van Den Broeke, D.J. ( ASML (USA) and Motorola (USA) )
Hsu, S.D. ( ASML (USA) and Motorola (USA) )
Chen, J.F. ( ASML (USA) and Motorola (USA) )
Laidig, T.L. ( ASML (USA) and Motorola (USA) )
Corcoran, N. ( ASML (USA) and Motorola (USA) )
Hollerbach, U. ( ASML (USA) and Motorola (USA) )
Wampler, K.E. ( ASML (USA) and Motorola (USA) )
Shi, X. ( ASML (USA) and Motorola (USA) )
Conley, W. ( ASML (USA) and Motorola (USA) )
さらに 5 件
掲載資料名:
Optical Microlithography XVII
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
5377
発行年:
2004
開始ページ:
222
終了ページ:
240
総ページ数:
19
出版情報:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819452900 [0819452904]
言語:
英語
請求記号:
P63600/5377.1
資料種別:
国際会議録

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