Mist deposition of thin photoresist films

Mist deposition of thin photoresist films

著者名:

Mahoney, W.J. ( The Pennsylvania State Univ. (USA) )
Roman, P. ( Primaxx, Inc. (USA) )
Mumbauer, P. ( Primaxx, Inc. (USA) )
Ruzyllo, J. ( The Pennsylvania State Univ. (USA) )

掲載資料名:

Advances in resist technology and processing XXI

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

5376

発行年:

2004

開始ページ:

861

終了ページ:

866

総ページ数:

6

出版情報:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819452894 [0819452890]

言語:

英語

請求記号:

P63600/5376.2

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00013726
シリーズID:	PA00000029
会議名:	SPIE Advanced Lithography : Advances in resist technology and processing
回次:	2004 : 21st
会議開催地:	Santa Clara, CA, USA
会議開催年:	2004.02.23-2004.02.24

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2 国際会議録 Characterization of Thin Dielectric Layers using the Non-Contact Surface Charge Profiler (SCP) Method Roman, P., Lee, D.D., Wang, J., Mumbauer, P., Grant, R., Tower, J., Kamieniecki, E., Lukasiak, L., Ruzyllo, aud J. Electrochemical Society	8 国際会議録 PROBING THE NUCLEATION OF A THIN METAL FILM: ATOM DEPOSITION VS. CLUSTER BEAM DEPOSITION Mahoney, W., Lin, S. T., Andres, R. P. MRS - Materials Research Society
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4 国際会議録 49 Characteristics of Hf(Si,O) Gate Dielectrics as a Function of Hf Content Chang, K., Shallenberger, J., Chang, F.-M., Shanmugasundaram, K., Roman, P., Mumbauer, P., Ruzyllo, J. Electrochemical Society	10 国際会議録 RF AEROSOL MIST PLASMA DEPOSITION OF OXIDE FILMS Williams, J. A. A., Shen, C. Q., Vuong, K. D., Tenpas, E., Condrate, R. A., Sr., Lee, D. H., Wang, H., Fagan, J., Wang, … MRS - Materials Research Society
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