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Layout decompression chip for maskless lithography

著者名:
Nikolic, B. ( Univ. of California/Berkeley (USA) )
Wild, B. ( Univ. of California/Berkeley (USA) )
Dai, V. ( Univ. of California/Berkeley (USA) )
Shroff, Y.A. ( Univ. of California/Berkeley (USA) )
Warlick, B. ( Univ. of California/Berkeley (USA) )
Zakhor, A. ( Univ. of California/Berkeley (USA) )
Oldham, W.G. ( Univ. of California/Berkeley (USA) )
さらに 2 件
掲載資料名:
Emerging Lithographic Technologies VIII
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
5374
発行年:
2004
開始ページ:
1092
終了ページ:
1099
総ページ数:
8
出版情報:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819452870 [0819452874]
言語:
英語
請求記号:
P63600/5374.2
資料種別:
国際会議録

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