Measuring thermal expansion variations in ULE glass with interferometry
- 著者名:
- Harper, B.L. ( Corning Inc. (USA) )
- Hrdina, K.E. ( Corning Inc. (USA) )
- Navan, W.D. ( Corning Inc. (USA) )
- Ellison, J. ( Corning Tropel (USA) )
- Fanning, A. ( Fanning Technical Services (USA) )
- 掲載資料名:
- Emerging Lithographic Technologies VIII
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 5374
- 発行年:
- 2004
- 開始ページ:
- 847
- 終了ページ:
- 853
- 総ページ数:
- 7
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819452870 [0819452874]
- 言語:
- 英語
- 請求記号:
- P63600/5374.2
- 資料種別:
- 国際会議録
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