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Advanced low-complexity compression for maskless lithography data

著者名:
  • Dai, V. ( Univ. of California/Berkeley (USA) )
  • Zakhor, A. ( Univ. of California/Berkeley (USA) )
掲載資料名:
Emerging Lithographic Technologies VIII
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
5374
発行年:
2004
開始ページ:
610
終了ページ:
618
総ページ数:
9
出版情報:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819452870 [0819452874]
言語:
英語
請求記号:
P63600/5374.2
資料種別:
国際会議録

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