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Evaluation of spatial resolution in laser-terahertz emission microscope for inspecting electrical faults in integrated circuits

著者名:
  • Yamashita, M. ( RIKEN - The Institute of Physical and Chemical Reserarch (Japan) )
  • Kiwa, T. ( Osaka Univ. (Japan) )
  • Tonouchi, M. ( Osaka Univ. (Japan) )
  • Kawase, K. ( RIKEN - The Institute of Physical and Chemical Reserarch (Japan) )
掲載資料名:
Terahertz and gigahertz electronics and photonics III : 25-26 January 2004, San Jose, California, USA
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
5354
発行年:
2004
開始ページ:
104
終了ページ:
111
総ページ数:
8
出版情報:
Bellingham, Wash., USA: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819452627 [0819452629]
言語:
英語
請求記号:
P63600/5354
資料種別:
国際会議録

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