Fabrication of three-dimensional photonic crystals using lithographic processes

Fabrication of three-dimensional photonic crystals using lithographic processes

著者名:

Prather, D.W. ( Univ. of Delaware (USA) )
Peng, Y. ( Univ. of Delaware (USA) )
Schneider, G.J. ( Univ. of Delaware (USA) )
Murakowski, J. ( Univ. of Delaware (USA) )

掲載資料名:

Micromachining technology for micro-optics and nano-optics II : 27-29 January 2004, San Jose, California, USA

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

5347

発行年:

2004

開始ページ:

224

終了ページ:

232

総ページ数:

9

出版情報:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819452559 [0819452556]

言語:

英語

請求記号:

P63600/5347

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00013691
シリーズID:	PA00000029
会議名:	Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components : Micromachining Technology for Micro-Optics and Nano-Optics
回次:	2004 : 2nd
会議開催地:	San Jose, CA, USA
会議開催年:	2004.01.27-2004.01.29

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1 国際会議録 Fabrication of three-dimensional Yablonovite photonic crystals by multiple-exposure UV interference lithography Schneider, G.J., Wetzel, E.D., Murakowski, J.A., Prather, D.W. SPIE - The International Society of Optical Engineering	7 国際会議録 Losses in slab photonic crystals induced by fabrication tolerances Murakowski, J.A., Schneider, G.J., Sharkawy, A.S., Shi, S., Prather, D.W. SPIE - The International Society of Optical Engineering
2 国際会議録 Fabrication of 3D photonic crystals with embedded defects Murakowski, J., Schneider, G.J., Prather, D.W. SPIE - The International Society of Optical Engineering	8 国際会議録 Fabrication of three-dimensional photonic crystals with multilayer photolithography Yao, P., Schneider, G.J., Miao, B., Prather, D.W., Wetzel, E.D., O'Brien, D.J. SPIE - The International Society of Optical Engineering
3 国際会議録 Self-collimation in three-dimensional photonic crystals Prather, D.W., Shi, S., Venkataraman, S., Lu, Z., Murakowski, J., Schneider, G.J. SPIE - The International Society of Optical Engineering	9 国際会議録 Fabrication of three-dimensional near-IR photonic crystals using deep-UV contact photolithography and silicon micromachining [6109-03] Citla, B. S., Venkataraman, S., Murakowski, J., Schneider, G. J., Prather, D. W. SPIE - The International Society of Optical Engineering
4 国際会議録 Etching three-dimensional photonic crystals in GaAs Murakowski, J.A., Schuetz, C., Schneider, G.J., Prather, D.W. SPIE - The International Society of Optical Engineering	10 国際会議録 Fabrication of photonic crystals using chemical lithography P. Yao, M. Murakowski, L. Prather, G. J. Schneider, J. Murakowski, D. W. Prather SPIE - The International Society of Optical Engineering
5 国際会議録 Combination lithography for photonic crystal circuits Murakowski, J.A., Schneider, G.J., Prather, D.W. SPIE-The International Society for Optical Engineering	11 国際会議録 Modeling of photonic crystals and nanostructures (Invited Paper) Prather, D.W., Shi, S., Murakowski, J.A., Schneider, G.J. SPIE-The International Society for Optical Engineering
6 国際会議録 Fabrication of 3D silicon photonic crystal structures using conventional micromachining technology Venkataraman, S., Murakowski, J., Schneider, G.J., Prather, D.W. SPIE - The International Society of Optical Engineering	12 国際会議録 Investigation of the III-V oxidation process for the fabrication of sub-micron three dimensional photonic devices [6110-25] Swaminathan, K., Murakowski, J., Schuetz, C., Schneider, G. J., Citla, B. S., Prather, D. W. SPIE - The International Society of Optical Engineering

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