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Fabrication of 3D silicon photonic crystal structures using conventional micromachining technology

著者名:
掲載資料名:
Micromachining technology for micro-optics and nano-optics II : 27-29 January 2004, San Jose, California, USA
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
5347
発行年:
2004
開始ページ:
195
終了ページ:
204
総ページ数:
10
出版情報:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819452559 [0819452556]
言語:
英語
請求記号:
P63600/5347
資料種別:
国際会議録

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