Analog micro-optics fabrication by use of a binary phase grating mask

Analog micro-optics fabrication by use of a binary phase grating mask

著者名:

Sung, J. ( CREOL/Univ. of Central Florida (USA) )
Pitchumani, M. ( CREOL/Univ. of Central Florida (USA) )
Brown, J. ( CREOL/Univ. of Central Florida (USA) )
Hockel, H. ( CREOL/Univ. of Central Florida (USA) )
Johnson, E.G. ( CREOL/Univ. of Central Florida (USA) )

掲載資料名:

Micromachining technology for micro-optics and nano-optics II : 27-29 January 2004, San Jose, California, USA

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

5347

発行年:

2004

開始ページ:

62

終了ページ:

70

総ページ数:

9

出版情報:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819452559 [0819452556]

言語:

英語

請求記号:

P63600/5347

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00013691
シリーズID:	PA00000029
会議名:	Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components : Micromachining Technology for Micro-Optics and Nano-Optics
回次:	2004 : 2nd
会議開催地:	San Jose, CA, USA
会議開催年:	2004.01.27-2004.01.29

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