Developments in SiO2 multistep diffractive optical element for beam homogenizing
- 著者名:
- Kurisu, K. ( Sumitomo Electric Industries, Ltd. (Japan) )
- Okada, T. ( Sumitomo Electric Hardmetal Corp. (Japan) )
- Ebata, K. ( Sumitomo Electric Industries, Ltd. (Japan) )
- 掲載資料名:
- Micromachining technology for micro-optics and nano-optics II : 27-29 January 2004, San Jose, California, USA
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 5347
- 発行年:
- 2004
- 開始ページ:
- 54
- 終了ページ:
- 61
- 総ページ数:
- 8
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819452559 [0819452556]
- 言語:
- 英語
- 請求記号:
- P63600/5347
- 資料種別:
- 国際会議録
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9
国際会議録
Diffractive/refractive hybrid f-theta lens for laser drilling of multilayer printed circuit boards
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