Electrostatic micromirror fabricated using CMP and anodic bonding

Electrostatic micromirror fabricated using CMP and anodic bonding

著者名:

Kim, K. ( Korea Electronics Technology Institute (South Korea) )

Choi, W. ( Korea Univ. (South Korea) )

Park, K. ( Korea Electronics Technology Institute (South Korea) )

Park, J.-S. ( Korea Electronics Technology Institute (South Korea) )

Park, H.-D. ( Korea Electronics Technology Institute (South Korea) )

Heo, H. ( Korea Univ. (South Korea) )

さらに 1 件

掲載資料名:

MOEMS and Miniaturized Systems IV

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

5346

発行年:

2004

開始ページ:

175

終了ページ:

183

総ページ数:

9

出版情報:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819452542 [0819452548]

言語:

英語

請求記号:

P63600/5346

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00013690
シリーズID:	PA00000029
会議名:	Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components : MOEMS and Miniaturized Systems
回次:	2004 : 4th
会議開催地:	San Jose, CA, USA
会議開催年:	2004.01.27-2004.01.28

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