Sensitivity of piezoresistive readout device for microfabricated acoustic spectrum analyzer

Sensitivity of piezoresistive readout device for microfabricated acoustic spectrum analyzer

著者名:

Stalford, H.L. ( Consultant (USA) and Univ. of Oklahoma (USA) )
Apblett, C.A. ( Sandia National Labs. (USA) )
Mani, S.S. ( Sandia National Labs. (USA) )
Schubert, W.K. ( Sandia National Labs. (USA) )
Jenkins, M.W. ( Sandia National Labs. (USA) )

掲載資料名:

MEMS/MOEMS Components and Their Applications

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

5344

発行年:

2004

開始ページ:

36

終了ページ:

43

総ページ数:

8

出版情報:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819452528 [0819452521]

言語:

英語

請求記号:

P63600/5344

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00013688
シリーズID:	PA00000029
会議名:	Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components : MEMS/MOEMS Components and Their Applications
回次:	2004
会議開催地:	San Jose, CA, USA
会議開催年:	2004.01.26-2004.01.27

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