Blank Cover Image

Fabrication of an electrochemical tip-probe system embedded in SiNx cantilevers for simultaneous SECM and AFM analysis

著者名:
掲載資料名:
Micromachining and Microfabrication Process Technology IX
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
5342
発行年:
2004
開始ページ:
53
終了ページ:
64
総ページ数:
12
出版情報:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819452504 [0819452505]
言語:
英語
請求記号:
P63600/5342
資料種別:
国際会議録

類似資料:

1 国際会議録 Ultrasharp high-aspect-ratio probe array for SECM and AFM Analysis

Tao, Y., Fasching, R.J., Prinz, F.B.

SPIE - The International Society of Optical Engineering
7 国際会議録 Scalable rotary actuators with embedded shape memory alloys

Park,B.-H., Shantz,M., Prinz,F.B.

SPIE-The International Society for Optical Engineering
2 国際会議録 Pencil probe system for electrochemical analysis and modification in nanometer dimensions

Fasching, R.J., Tao, Y., Hammerick, K., Prinz, F.B.

SPIE-The International Society for Optical Engineering
8 国際会議録 Shape deposition manufacturing of smart metallic structures with embedded sensors

Li,X.C., Golnas,A., Prinz,F.B.

SPIE - The International Society for Optical Engineering
3 国際会議録 Nanofabrication of electrochemical planar probes for single cell analysis [6109-02]

Fasching, R. J., Bai, S. -J., Fabian, T., Prinz, F. B.

SPIE - The International Society of Optical Engineering
9 国際会議録 Fabrication and use of metal tip and tip-on-tip probes for AFM-based device analysis

Hantschel,T., De Wolf,P., Trenkler,T., Stephenson,R., Vandervorst,W.

SPIE-The International Society for Optical Engineering
4 国際会議録 High-density multilayer connection technology for MEMS and CMOS applications

Bai, S.J., Fasching, R.J., Prinz, F.B.

SPIE-The International Society for Optical Engineering
10 国際会議録 High-speed AFM probe with micromachined membrane tip

B. Kim, B. H. Kwak, F. Jamil

Society of Photo-optical Instrumentation Engineers
5 国際会議録 Fabrication of piezoresistive-sensed AFM cantilever probe with integrated tip

Rangelow,I.W., Shi,F., Hudek,P., Gotszalk,T., Grabiec,P.B., Dumania,P.

SPIE-The International Society for Optical Engineering
11 国際会議録 Integrated cantilever fabrication and system development for ultrasonic and acoustic scanning probe microscopy

Olson, S., Sankaran, B., Altemus, B., Xu, B., Geer, R.

SPIE - The International Society of Optical Engineering
6 国際会議録 Thin Film Thermo-Mechanical Sensors Embedded in Metallic Structures

Golnas,T., Prinz,F.B.

Trans Tech Publications
12 国際会議録 Fabrication of cantilever probes with integrated piezoresistive read-out and built-in piezoelectric actuators

Olson, S., Altemus, B., Sankaran, B., Tokranova, N., Geer, R., Castracane, J., Xu, B.

SPIE - The International Society of Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12