Optimization design and fabrication of photonic crystal waveguides based on SOI using 248-nm deep-UV lithography
- 著者名:
- 掲載資料名:
- Materials, Active Devices, and Optical Amplifiers
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 5280
- 発行年:
- 2004
- 開始ページ:
- 798
- 終了ページ:
- 804
- 総ページ数:
- 7
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819451750 [0819451754]
- 言語:
- 英語
- 請求記号:
- P63600/5280.2
- 資料種別:
- 国際会議録
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6
国際会議録
A 100-channel near-infrared SOI waveguide microspectrometer: design and fabrication challenges
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |