Angled stripe InGaAsP/InP SLED fabricated by low-damage inductively coupled plasma dry etching

Angled stripe InGaAsP/InP SLED fabricated by low-damage inductively coupled plasma dry etching

著者名:

Zhang, J. ( Accelink Technologies Co., Ltd. (China) )

Huang, X.-D. ( Accelink Technologies Co., Ltd. (China) )

Chang, J. ( Accelink Technologies Co., Ltd. (China) )

Liu, Y.-J. ( Accelink Technologies Co., Ltd. (China) )

Gan, Y. ( Accelink Technologies Co., Ltd. (China) )

Li, L.S. ( Accelink Technologies Co., Ltd. (China) )

Wang, D.-L. ( Accelink Technologies Co., Ltd. (China) )

Liu, T. ( Accelink Technologies Co., Ltd. (China) )

Jiang, S. ( Accelink Technologies Co., Ltd. (China) )

Deng, L. ( Oxford Instruments Plc (United Kingdom) )

さらに 5 件

掲載資料名:

Materials, Active Devices, and Optical Amplifiers

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

5280

発行年:

2004

開始ページ:

473

終了ページ:

476

総ページ数:

4

出版情報:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819451750 [0819451754]

言語:

英語

請求記号:

P63600/5280.2

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00013623
シリーズID:	PA00000029
会議名:	APOC : Asia Communications and Photonics
回次:	2003
会議開催地:	Wuhan, China
会議開催年:	2003.11.04-2003.11.06

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