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ICP etching of InP and its applications in photonic circuits

著者名:
Karouta, F. ( Technische Univ. Eindhoven (Netherlands) )
Zhu, Y.C. ( Technische Univ. Eindhoven (Netherlands) )
Geluk, E.J. ( Technische Univ. Eindhoven (Netherlands) )
van der Tol, J.J.G.M. ( Technische Univ. Eindhoven (Netherlands) )
Binsma, J.J.M. ( JDS Uniphase Corp. (Netherlands) )
Smit, M.K. ( Technische Univ. Eindhoven (Netherlands) )
さらに 1 件
掲載資料名:
Photonics: Design, Technology, and Packaging
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
5277
発行年:
2004
開始ページ:
22
終了ページ:
28
総ページ数:
7
出版情報:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819451705 [0819451703]
言語:
英語
請求記号:
P63600/5277
資料種別:
国際会議録

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