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Sol-gel deposition of PZT thick film on Pt/Ti/SOI substrate and application to 2D micro scanning mirror

著者名:
  • Kobayashi, T. ( National Institute of Advanced Industrial Science (Japan) )
  • Tsaur, J. ( National Institute of Advanced Industrial Science (Japan) )
  • Ichiki, M. ( National Institute of Advanced Industrial Science (Japan) )
  • Maeda, R. ( National Institute of Advanced Industrial Science (Japan) )
掲載資料名:
Device and process technologies for MEMS, microelectronics, and photonics III : 10-12 December 2003, Perth, Australia
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
5276
発行年:
2004
開始ページ:
524
終了ページ:
531
総ページ数:
8
出版情報:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819451699 [081945169X]
言語:
英語
請求記号:
P63600/5276
資料種別:
国際会議録

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