Determination of residual stress in low-temperature PECVD silicon nitride thin films

Determination of residual stress in low-temperature PECVD silicon nitride thin films

著者名:

Martyniuk, M.P. ( Univ. of Western Australia (Australia) )
Antoszewski, J. ( Univ. of Western Australia (Australia) )
Musca, C.A. ( Univ. of Western Australia (Australia) )
Dell, J.M. ( Univ. of Western Australia (Australia) )
Faraone, L. ( Univ. of Western Australia (Australia) )

掲載資料名:

Device and process technologies for MEMS, microelectronics, and photonics III : 10-12 December 2003, Perth, Australia

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

5276

発行年:

2004

開始ページ:

451

終了ページ:

462

総ページ数:

12

出版情報:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819451699 [081945169X]

言語:

英語

請求記号:

P63600/5276

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00013618
シリーズID:	PA00000029
会議名:	Smart Materials, Nano-, and Micro- Smart Systems : Device and process technologies for MEMS, microelectronics, and photonics
回次:	2003 : 3rd
会議開催地:	Perth, Australia
会議開催年:	2003.12.10-2003.12.12

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3 国際会議録 Toward MEMS-based infrared tunable microspectrometers Antoszewski, J., Dell, J.M., Shivalimar, T., Martyniuk, M., Winchester, K., Wehner, J., Musca, C.A., Faraone, L. SPIE-The International Society for Optical Engineering	9 国際会議録 Excess noise in MWIR photovoltaic detectors fabricated using a new junction formation technology Rais,M.H., Musca,C.A., Dell,J.M., Antoszewski,J., Nener,B.D., Faraone,L. SPIE - The International Society for Optical Engineering
4 国際会議録 Mobility spectrum techniques for characterizing multilayer semiconductors structures Musca, C.A., Nguyen, T., Antoszewski, J., Redfern, D.A., Dell, J.M., Faraone, L. SPIE-The International Society for Optical Engineering	10 国際会議録 Performance of MWIR HgCdTe Photovoltaic Detectors Fabricated by Reactive Ion Etching Induced Type Conversion Rais,M.H., Musca,C.A., Dell,J.M., Antoszewski,J., Nener,B.D., Faraone,L. SPIE - The International Society for Optical Engineering
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6 国際会議録 Thermal Stability in HgCdTe IR Photodiodes Dell, J.M., Nguyen, T., Musca, C.A., Antoszewski, J., Faraone, L., Pal, R. Materials Research Society	12 国際会議録 Refractive index engineering for a distributed Bragg reflector for a resonant-cavity-enhanced detector Wehner, J.G.A., Sewell, R., Antoszewski, J., Musca, C.A., Dell, J.M., Faraone, L. SPIE - The International Society of Optical Engineering

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