Chemical structure of low-temperature plasma-deposited silicon nitride thin films

Chemical structure of low-temperature plasma-deposited silicon nitride thin films

著者名:

Soh, M.T. ( Univ. of Western Australia (Australia) )
Savvides, N. ( CSIRO (Australia) )
Musca, C.A. ( Univ. of Western Australia (Australia) )
Dell, J.M. ( Univ. of Western Australia (Australia) )
Faraone, L. ( Univ. of Western Australia (Australia) )

掲載資料名:

Device and process technologies for MEMS, microelectronics, and photonics III : 10-12 December 2003, Perth, Australia

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

5276

発行年:

2004

開始ページ:

434

終了ページ:

441

総ページ数:

8

出版情報:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819451699 [081945169X]

言語:

英語

請求記号:

P63600/5276

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00013618
シリーズID:	PA00000029
会議名:	Smart Materials, Nano-, and Micro- Smart Systems : Device and process technologies for MEMS, microelectronics, and photonics
回次:	2003 : 3rd
会議開催地:	Perth, Australia
会議開催年:	2003.12.10-2003.12.12

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6 国際会議録 The effects of vacuum baking on the I-V characteristics of LWIR HgCdTe photodiodes Nguyen, T.H., Musca, C.A., Dell, J.M., Antoszewski, J., Faraone, L. SPIE - The International Society of Optical Engineering	12 国際会議録 Accurate determination of composition profiles in abrupt MBE-grown HgCdTe heterostructures Sewell, R.H., Dell, J.M., Musca, C.A., Faraone, L. SPIE - The International Society of Optical Engineering

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