Preparation of PZT films derived by hybrid processing for MEMS application

Preparation of PZT films derived by hybrid processing for MEMS application

著者名:

Yan, L. ( Tohoku Univ. (Japan) )
Wang, Z.J.M. ( Tohoku Univ. (Japan) )
Kokawa, H. ( Tohoku Univ. (Japan) )
Maeda, R. ( National Institute of Advanced Industrial Science and Technology (Japan) )

掲載資料名:

Device and process technologies for MEMS, microelectronics, and photonics III : 10-12 December 2003, Perth, Australia

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

5276

発行年:

2004

開始ページ:

414

終了ページ:

421

総ページ数:

8

出版情報:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819451699 [081945169X]

言語:

英語

請求記号:

P63600/5276

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00013618
シリーズID:	PA00000029
会議名:	Smart Materials, Nano-, and Micro- Smart Systems : Device and process technologies for MEMS, microelectronics, and photonics
回次:	2003 : 3rd
会議開催地:	Perth, Australia
会議開催年:	2003.12.10-2003.12.12

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