X-ray reflectometry applied to amorphous carbon thin films prepared by sputtering radio frequency

X-ray reflectometry applied to amorphous carbon thin films prepared by sputtering radio frequency

著者名:

Aboudihab, I. ( Cadi Ayyad Univ. (Morocco) and Univ. Laval (Canada) )
Ech-chamikh, E. ( Cadi Ayyad Univ. (Morocco) )
Lessard, R.A. ( COPL/Univ. Laval (Canada) )

掲載資料名:

Applications of photonic technology 6 : closing the gap between theory, development, and application : Photonics North 2003

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

5260

発行年:

2003

開始ページ:

591

終了ページ:

595

総ページ数:

5

出版情報:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819451484 [0819451487]

言語:

英語

請求記号:

P63600/5260

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00013605
シリーズID:	PA00000029
会議名:	ICAPT : International Conference on Applications of Photonic Technology : Photonics North
回次:	2003 : 6th
会議開催地:	Montreal, QC, Canada
会議開催年:	2003.05.25-2003.05.29

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