Beyond k1=0.25 lithography: 70-nm L/S patterning using KrF scanners

Beyond k1=0.25 lithography: 70-nm L/S patterning using KrF scanners

著者名:

Ebihara, T. ( Canon USA, Inc. (USA) )

Levenson, M.D. ( M.D. Levenson Consulting (USA) )

Liu, W. ( Applied Materials Inc. (USA) )

He, J. ( Applied Materials Inc. (USA) )

Yeh, W. ( Applied Materials Inc. (USA) )

Ahn, S. ( Applied Materials Inc. (USA) )

Oga, T. ( Canon USA, Inc. (USA) )

Shen, M. ( Applied Materials Inc. (USA) )

M'saad, H. ( Applied Materials Inc. (USA) )

さらに 4 件

掲載資料名:

23rd Annual BACUS Symposium on Photomask Technology

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

5256

発行年:

2003

開始ページ:

985

終了ページ:

994

総ページ数:

10

出版情報:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819451439 [0819451436]

言語:

英語

請求記号:

P63600/5256.2

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00013601
シリーズID:	PA00000029
会議名:	SPIE Photomask Technology : Annual BACUS Symposium on Photomask Technology
回次:	2003 : 23rd
会議開催地:	Monterey, California, USA
会議開催年:	2003.09.09-2003.09.12

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