Results from a new reticle defect inspection platform

Results from a new reticle defect inspection platform

著者名:

Broadbent, W.H. ( KLA-Tencor Corp. (USA) )

Wiley, J.N. ( KLA-Tencor Corp. (USA) )

Saidin, Z.K. ( KLA-Tencor Corp. (USA) )

Watson, S.G. ( KLA-Tencor Corp. (USA) )

Alles, D.S. ( KLA-Tencor Corp. (USA) )

Zurbrick, L.S. ( KLA-Tencor Corp. (USA) )

Mack, C.A. ( KLA-Tencor Corp. (USA) )

さらに 2 件

掲載資料名:

23rd Annual BACUS Symposium on Photomask Technology

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

5256

発行年:

2003

開始ページ:

474

終了ページ:

488

総ページ数:

15

出版情報:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819451439 [0819451436]

言語:

英語

請求記号:

P63600/5256.1

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00013600
シリーズID:	PA00000029
会議名:	SPIE Photomask Technology : Annual BACUS Symposium on Photomask Technology
回次:	2003 : 23rd
会議開催地:	Monterey, California, USA
会議開催年:	2003.09.09-2003.09.12

類似資料:

1 国際会議録 Results from a new die-to-database reticle inspection platform Broadbent, W.H., Wiley, J.N., Saidin, Z.K., Watson, S.G., Alles, D.S., Zurbrick, L.S., Mack, C.A. SPIE - The International Society of Optical Engineering	7 国際会議録 Multibeam high-resolution die-to-database reticle inspection Volk,W.W., Broadbent,W.H., Garcia,H.I., Watson,S.G., Lim,P.M., Ruch,W.E. SPIE-The International Society for Optical Engineering
2 国際会議録 High-resolution ultraviolet defect inspection of DAP(darkfield alternate phase)reticles Liebmann,L.W., Mansfield,S.M., Wong,A.K., Smolinski,J.G., Peng,S., Kimmel,K.R., Rudzinski,M.W., Wiley,J.N., … SPIE - The International Society for Optical Engineering	8 国際会議録 Reticle inspection system using DUV wavelength and new algorithm platform for advanced reticle inspection for 0.13-ｦﾌm technology node Alles,D., Beek,P.Ter, Juang,S., Wiley,J.N., Hsia,K. SPIE - The International Society for Optical Engineering
3 国際会議録 Measuring and assessing printability of reticle pinhole defects Taylor, D., Vacca, A., Zurbrick, L.S., Broadbent, W.H., Fiekowsky, P. SPIE-The International Society for Optical Engineering	9 国際会議録 Improved method for measuring and assessing reticle pinhole defects Taylor,D., Vacca,A., Zurbrick,L., Howard,W.B., Broadbent,W.H. SPIE-The International Society for Optical Engineering
4 国際会議録 Results from a new die-to-database reticle inspection platform W. Broadbent, Y. Xiong, M. Giusti, R. Walsh, A. Dayal SPIE - The International Society of Optical Engineering	10 国際会議録 Multibeam resolution die-to database reticle inspection Volk, W.W., Broadbent, W.H., Garcia, H.I., Waston, S.G., Lim, P.M., Ruch, W.E. SPIE-The International Society for Optical Engineering
5 国際会議録 New die-to-database inspection algorithm for inspection of 90-nm node reticles Garcia, H.I., Volk, W.W., Watson, S., Hess, C., Aquino, C., Wiley, J., Mack, C.A. SPIE-The International Society for Optical Engineering	11 国際会議録 Reticle defects on optical proximity correction features Zurbrick,L.S. SPIE-The International Society for Optical Engineering
6 国際会議録 Field results from a new die-to-database reticle inspection platform W. Broadbent, I. Yokoyama, P. Yu, K. Seki, R. Nomura, H. Schmalfuss, J. Heumann, J. -P. Sier SPIE - The International Society of Optical Engineering	12 国際会議録 Characterization of an advanced-performance reticle defect inspection algorithm Wiley,J.N., Aquino,C., Burnham,D.V., Vacca,A. SPIE-The International Society for Optical Engineering

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