Simulation of mask CD variation for different local densities with in-house developed e-beam lithography simulator
- 著者名:
Kim, M.-Y. ( Samsung Electronics Co., Ltd. (South Korea) ) Ki, W.-T. ( Samsung Electronics Co., Ltd. (South Korea) ) Lee, S.-H. ( Samsung Advanced Institute of Technology (South Korea) ) Choi, J.-H. ( Samsung Electronics Co., Ltd. (South Korea) ) Choi, S.-W. ( Samsung Electronics Co., Ltd. (South Korea) ) Sohn, J.-M. ( Samsung Electronics Co., Ltd. (South Korea) ) - 掲載資料名:
- 23rd Annual BACUS Symposium on Photomask Technology
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 5256
- 発行年:
- 2003
- 開始ページ:
- 50
- 終了ページ:
- 58
- 総ページ数:
- 9
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819451439 [0819451436]
- 言語:
- 英語
- 請求記号:
- P63600/5256.1
- 資料種別:
- 国際会議録
類似資料:
SPIE - The International Society for Optical Engineering |
Society of Photo-optical Instrumentation Engineers |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
10
国際会議録
Dose-modulation-induced mask CD error on simultaneous correction of fogging and loading effect
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |