Principles of highest-precision optical parts estimation on the basis of a point-diffraction interferometer

Principles of highest-precision optical parts estimation on the basis of a point-diffraction interferometer

著者名:

Voznesensky, N.B. ( VTT Optik Ltd. (Estonia) )
Lee, K.-H. ( Korea Electrotechnology Research Institute (South Korea) )
Kirillovsky, V.K. ( St. Petersburg Institute of Fine Mechanics and Optics (Russia) )

掲載資料名:

Optical fabrication, testing, and metrology : 30 September-3 October 2003, St. Etienne, France

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

5252

発行年:

2004

開始ページ:

241

終了ページ:

251

総ページ数:

11

出版情報:

Bellingham, Wash., USA: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819451361 [0819451363]

言語:

英語

請求記号:

P63600/5252

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00013597
シリーズID:	PA00000029
会議名:	SPIE Optical Systems Design : Optical fabrication, testing, and metrology
回次:	2003
会議開催地:	St. Etienne, France
会議開催年:	2003.09.30-2003.10.03

類似資料:

1 国際会議録 Interferometers with diffraction on dot aperture for testing of shape errors of precise surfaces Kirillovsky, V.K., Voznesensky, N.B., Troukhine, M.M., Lee, K.-H. SPIE - The International Society of Optical Engineering	7 国際会議録 Instantaneous phase-shift point-diffraction interferometer Millerd, J.E., Brock, N.J., Hayes, J.B., Wyant, J.C. SPIE - The International Society of Optical Engineering
2 国際会議録 Concept of far-field optical evaluation of the apparatus function of an SNOM tip Voznesensky, N.B., Veiko, V.P., Ivanova, T.V., Lee, K.-H. SPIE - The International Society of Optical Engineering	8 国際会議録 Real-time precision displacement measurement interferometer using the robust discrete time Kalman filter Lee, Y., Park, T., Choi, H., Han, C., Choi, T., Lee, N., Lee, H., Na, K. SPIE - The International Society of Optical Engineering
3 国際会議録 Interferometric testing of aspheric components for EUV reduced camera E. Gavrilov, V. Kirillovsky, P. Orlov, N. Voznesensky, A. Zhevlakov SPIE - The International Society of Optical Engineering	9 国際会議録 Phase-stepped point diffraction interferometer using liquid crystals C.R. Mercer, K. Creath, N. Rashidnia Society of Photo-optical Instrumentation Engineers
4 国際会議録 Use of vector diffraction theory in theoretical and experimental investigation of SNOM tips Voznesensky,N.B., Veiko,V.P. SPIE-The International Society for Optical Engineering	10 国際会議録 Current status of ASET-HIT EUV phase-shifting point diffraction interferometer Gomel,Y., Sugisaki,K., Zhu,Y., Niibe,M., Watanabe,T., Kinoshita,H. SPIE-The International Society for Optical Engineering
5 国際会議録 Project of the small-size space optical interferometer of two-basis Boyarchuk,A.A., Bagrov,A.V., Rykhlova,L.V., Sysoev,V.K., Pichkhadze,K.M., Stekolschikov,O.Yu., Ryzhenko,A.P. SPIE-The International Society for Optical Engineering	11 国際会議録 Characterization and fabrication of MOEMS-based diffractive optical switching elements [6114-17] Kwon H N, Lee J-H, Takahashi K, Toshiyoshi H SPIE - The International Society of Optical Engineering
6 国際会議録 Instantaneous phase-shift point-diffraction interferometer Millerd, J. E., Martinek, S. J., Brock, N. J., Hayes, J. B., Wyant, J. C. SPIE - The International Society of Optical Engineering	12 国際会議録 Adding static printing capabilities to the EUV phase-shifting point diffraction interferometer Naulleau,P., Gldberg,K.A., Anderson,E.H., Batson,P.J., Denham,P., Jackson,K.H., Rekawa,S., Bokor,J. SPIE-The International Society for Optical Engineering

1

2

3

4

5

6

7

8

9

10

11

12