On-machine measurement with LTP (long trace profiler)
- 著者名:
Moriyasu, S. ( RIKEN-The Institute of Physical and Chemical Research (Japan) ) Takacs, P.Z. ( Brookhaven National Lab. (USA) ) Kato, J. ( RIKEN-The Institute of Physical and Chemical Research (Japan) ) Lin, W. ( RIKEN-The Institute of Physical and Chemical Research (Japan) ) Yamagata, Y. ( RIKEN-The Institute of Physical and Chemical Research (Japan) ) Ohmori, H. ( RIKEN-The Institute of Physical and Chemical Research (Japan) ) - 掲載資料名:
- Optical manufacturing and testing V : 3-5 August 2003, San Diego, California, USA
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 5180
- 発行年:
- 2003
- 開始ページ:
- 385
- 終了ページ:
- 392
- 総ページ数:
- 8
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819450531 [0819450537]
- 言語:
- 英語
- 請求記号:
- P63600/5180
- 資料種別:
- 国際会議録
類似資料:
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |