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Principles and applications of laser-induced liquid-phase jet-chemical etching

著者名:
  • Stephen, A. ( Bremer Institut fuer Angewandte Strahltechnik (Germany) )
  • Metev, S. ( Bremer Institut fuer Angewandte Strahltechnik (Germany) )
  • Vollertsen, F. ( Bremer Institut fuer Angewandte Strahltechnik (Germany) )
掲載資料名:
Fourth International Symposium on Laser Precision Microfabrication : 21-24 June, 2003, Munich, Germany
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
5063
発行年:
2003
開始ページ:
227
終了ページ:
232
総ページ数:
6
出版情報:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819448699 [0819448699]
言語:
英語
請求記号:
P63600/5063
資料種別:
国際会議録

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