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Surface microstructuring of transparent materials by laser-induced backside wet etching using excimer laser

著者名:
Niino, H. ( National Institute of Advanced Industrial Science and Technology (AIST) (Japan) )
Ding, X. ( National Institute of Advanced Industrial Science and Technology (AIST) (Japan) )
Kurosaki, R. ( National Institute of Advanced Industrial Science and Technology (AIST) (Japan) )
Narazaki, A. ( National Institute of Advanced Industrial Science and Technology (AIST) (Japan) )
Sato, T. ( National Institute of Advanced Industrial Science and Technology (AIST) (Japan) )
Kawaguchi, Y. ( National Institute of Advanced Industrial Science and Technology (AIST) (Japan) )
さらに 1 件
掲載資料名:
Fourth International Symposium on Laser Precision Microfabrication : 21-24 June, 2003, Munich, Germany
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
5063
発行年:
2003
開始ページ:
193
終了ページ:
201
総ページ数:
9
出版情報:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819448699 [0819448699]
言語:
英語
請求記号:
P63600/5063
資料種別:
国際会議録

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