Fabrication of three-dimensional microstructures by stacking laser-direct-write layers
- 著者名:
- Jeong, S. ( Kwangju Institute of Science and Technology (South Korea) )
- Han, S. ( Kwangju Institute of Science and Technology (South Korea) )
- Selvan, J.S. ( Kwangju Institute of Science and Technology (South Korea) )
- 掲載資料名:
- Fourth International Symposium on Laser Precision Microfabrication : 21-24 June, 2003, Munich, Germany
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 5063
- 発行年:
- 2003
- 開始ページ:
- 44
- 終了ページ:
- 48
- 総ページ数:
- 5
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819448699 [0819448699]
- 言語:
- 英語
- 請求記号:
- P63600/5063
- 資料種別:
- 国際会議録
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5
国際会議録
Integrated tool for fabrication of electronic components by laser direct write (Invited Paper)
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
Materials Research Society |
SPIE-The International Society for Optical Engineering |