Polysilicon piezoresistive pressure sensor using silicon-on-insulator (SOI) approach
- 著者名:
Bhat, K.N.H. ( Indian Institute of Technology, Madras (India) ) Bhattacharya, E. ( Indian Institute of Technology, Madras (India) ) DasGupta, A. ( Indian Institute of Technology, Madras (India) ) DasGupta, N. ( Indian Institute of Technology, Madras (India) ) KotiReddy, B.R. ( Indian Institute of Technology, Madras (India) ) Rao, P.R. ( Indian Institute of Technology, Madras (India) ) Balasubramaniam, K. ( Indian Institute of Technology, Madras (India) ) - 掲載資料名:
- Smart Materials, Structures, and Systems
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 5062
- 発行年:
- 2003
- 開始ページ:
- 853
- 終了ページ:
- 862
- 総ページ数:
- 10
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819448682 [0819448680]
- 言語:
- 英語
- 請求記号:
- P63600/5062.2
- 資料種別:
- 国際会議録
類似資料:
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
8
国際会議録
FORMATION OF SILICON ON INSULATOR (SOI) WITH SEPARATION BY PLASMA IMPLANTATION OF OXYGEN (SPIMOX)
MRS - Materials Research Society |
SPIE-The International Society for Optical Engineering |
Society of Photo-optical Instrumentation Engineers |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
Trans Tech Publications |