Integrated piezoelectric thin films for microactuators

Integrated piezoelectric thin films for microactuators

著者名:

Krupanidhi, S.B. ( Indian Institute of Science (India) )
Laha, A. ( Indian Institute of Science (India) )

掲載資料名:

Smart Materials, Structures, and Systems

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

5062

発行年:

2003

開始ページ:

147

終了ページ:

153

総ページ数:

7

出版情報:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819448682 [0819448680]

言語:

英語

請求記号:

P63600/5062.1

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00013526
シリーズID:	PA00000029
会議名:	Smart materials, structures, and systems
回次:	2002
会議開催地:	Bangalore, India
会議開催年:	2002.12.12-2002.12.14

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