Role of Substrate on the Growth Process of Polycrystalline Silicon Thin Films by Low-Pressure Chemical Vapour Deposition

Role of Substrate on the Growth Process of Polycrystalline Silicon Thin Films by Low-Pressure Chemical Vapour Deposition

著者名:

Pereira, L.

掲載資料名:

Advanced materials forum II : proceedings of the II International Materials Symposium, Materiais 2003 and XI Encontro Sociedade Portugesa de Materiais - SPM, Campus da Caparica, April 14-16, Caparica, Portugal, 2003

シリーズ名:

Materials science forum

シリーズ巻号:

455-456

発行年:

2004

開始ページ:

112

終了ページ:

115

総ページ数:

4

出版情報:

Uetikon-Zuerich: Trans Tech Publications

ISSN:

02555476

ISBN:

9780878499410 [0878499415]

言語:

英語

請求記号:

M23650

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00013362
シリーズID:	PA00000012
会議名:	International Materials Symposium ; Encontro Sociedade Portugesa de Materiais - SPM
回次:	2003 : 2nd ; 11th
会議開催地:	Caparica, Portugal
会議開催年:	2003.04.14-2003.04.16

類似資料:

1 国際会議録 Sputtering Preparation of Silicon Nitride Thin Films for Gate Dielectric Applications Pereira, L., Aguas, H., Igreja, R., Martins, R.M.S., Nedev, N., Raniero, L., Fortunato, E., Martins, R. Trans Tech Publications	7 国際会議録 Insights on Amorphous Silicon Nip and MIS 3D Position Sensitive Detectors Martins, R., Costa, D., Aguas, H., Soares, F., Marques, A., Ferreira, I., Borges, P.M.R., Pereira, S., Raniero, L., … Trans Tech Publications
2 国際会議録 Growth of Polymorphous/Nanocrystalline Silicon Films Deposited by PECVD at 13.56 MHz Raniero, L., Martins, R., Aguas, H., Zang, S., Ferreira, I., Pereira, L., Fortunato, E., Boufendi, L. Trans Tech Publications	8 国際会議録 Effect of the Load Resistance in the Linearity and Sensitivity of MIS Position Sensitive Detectors Aguas, H., Pereira, L., Raniero, L., Fortunato, E., Martins, R. Materials Research Society
3 国際会議録 MIS Photodiodes of Polymorphous Silicon Deposited at Higher Growth Rates by 27.12 MHz PECVD Discharge Aguas, H., Pereira, L., Raniero, L., Fortunato, E., Martins, R. Trans Tech Publications	9 国際会議録 Multifunctional Thin Film Zinc Oxide Semiconductors: Application to Electronic Devices Fortunato, E., Goncalves, A., Marques, A., Pimentel, A., Barquinha, P., Aguas, H., Pereira, L., Raniero, L., Goncalves, … Trans Tech Publications
4 国際会議録 Batch Processing Method to Deposit a-Si:H Films by PECVD Raniero, L., Aguas, H., Pereira, L., Fortunato, E., Ferreira, I., Martins, R. Trans Tech Publications	10 国際会議録 Silicon Etching in CF4/O2 and SF6 Atmospheres Silva, A., Raniero, L., Ferreira, E., Aguas, H., Pereira, L., Fortunato, E., Martins, R. Trans Tech Publications
5 国際会議録 Polymorphous Silicon Films Produced in Large Area Reactors by PECVD at 27.12 MHz and 13.56 MHz Aguas, H., Raniero, L., Pereira, L., Fortunato, E., Cabarrocas, P. Roca i, Martins, R. Materials Research Society	11 国際会議録 Influence of Hydrogen Plasma on Electrical and Optical Properties of Transparent Conductive Oxides Raniero, L., Goncalves, A., Pimentel, A., Ferreira, I., Zhang, S., Pereira, L., Aguas, H., Fortunato, E., Martins, R. Materials Research Society
6 国際会議録 Amorphous Silicon Based p-i-i-n Structure for Color Sensor Zhang, S., Raniero, L., Fortunato, E., Pereira, L., Aguas, H., Ferreira, I., Martins, R. Materials Research Society	12 国際会議録 Characterization of Transparent and Conductive ZnO:Ga Thin Films Produced by rf Sputtering at Room Temperature Fortunato, E., Assuncao, V., Marques, A., Ferreira, I., Aguas, H., Pereira, L., Martins, R. Materials Research Society

1

2

3

4

5

6

7

8

9

10

11

12