Fabrication of Oxide/Semiconducting Coaxial Nanotubular Materials Using Atomic Layer Deposition

Fabrication of Oxide/Semiconducting Coaxial Nanotubular Materials Using Atomic Layer Deposition

著者名:

Jeong, D.K.

掲載資料名:

Designing, processing and properties of advanced engineering materials : proceedings of the 3rd International Symposium on Designing, Processing and Properties of Advanced Engineering Materials, held in Jeju, Korea, November 5-8, 2003

シリーズ名:

Materials science forum

シリーズ巻号:

449-452

発行年:

2004

開始ページ:

1165

終了ページ:

1168

総ページ数:

4

出版情報:

Zuerich: Trans Tech Publications

ISSN:

02555476

ISBN:

9780878499397 [0878499393]

言語:

英語

請求記号:

M23650

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00013360
シリーズID:	PA00000012
会議名:	International Symposium on Designing, Processing and Properties of Advanced Engineering Materials
回次:	3rd
会議開催地:	Jeju, Korea
会議開催年:	2003.11.05-2003.11.08

類似資料:

1 国際会議録 Fabrication of CdS Thin Film Pattern by CBD Method Using the Self-Assembled Monolayer Jung, S.H., Jeong, D.K., Kim, J.Y., Jung, W.G. Trans Tech Publications	7 国際会議録 Characteristics of ZnO Thin Film by Atomic Layer Deposition for Film Bulk Acoustic Resonator Kim, S.G., Jung, S.B., Oh, J.H., Kim, H.J., Shin, Y.H. Trans Tech Publications
2 国際会議録 Fabrication of GaN nanotubular material using MOCVD with aluminum oxide membrane (Invited Paper) [6127-21] Jung, W. G., Jung, S. H., Kung, P., Razeghi, M. SPIE - The International Society of Optical Engineering	8 国際会議録 Low-k SiBN (Silicon Boron Nitride) Film Synthesized by a Plasma-Assisted Atomic Layer Deposition S. Yang, J. Kim, J. Noh, H. Kim, S. Lee, J. Ahn, K. Hwang, Y. Shin, U. Chung, J. Moon, D. Lee, I. Yi, R. Jung, S. Kang Electrochemical Society
3 国際会議録 An Investigation of Silicon Oxide Thin Film by Atomic Layer Deposition Lee, Joo-Hyeon, Han, Chang-Hee, Kim, Un-Jung, Park, Chong-Ook, Rha, Sa-Kyun, Lee, Won-Jun Materials Research Society	9 国際会議録 Fabrication of Thin Film Using Nanosized Indium Tin Oxide (ITO) Powder and Its Degradation Characteristics Kim, Y.N., Park, J.H., Shin, H.G., Song, J.K., Lee, H.S. Trans Tech Publications
4 国際会議録 Synthesis and Electronic Transport Properties of Sn-Doped CoSb₃ K.H. Park, J.Y. Jung, J.I. Lee, K.W. Jang, W.G. Kim Trans Tech Publications	10 国際会議録 Study of Thermal Behavior in a Kroll Reactor for the Optimization of Ti Sponge Production H.N. Bae, S.H. Kim, G.G. Lee, S.K. Jo, J.Y. Jung Trans Tech Publications
5 国際会議録 Deposition and Characteristics of Tantalum Nitride Films by Plasma Assisted Atomic Layer Deposition as Cu Diffusion Barrier Na, Kyoung-Il, Park, Se-Jong, Jeong, Woo-Cheol, Kim, Se-Hoon, Boo, Sung-Eun, Bae, Nam-Jin, Lee, Jung-Hee Materials Research Society	11 国際会議録 A study of post-exposure baking effect for CAR process in photomask fabrication Park, D.-I., Seo, S.-K., Jeong, W.-G., Park, E.-S., Lee, J.-H., Kwon, H.-J., Kim, J.-M., Jung, S.-M., Choi, S.-S. SPIE-The International Society for Optical Engineering
6 国際会議録 Effects of Growth Sequence on Optical and Structural Properties of InAs/GaAs Quantum Dots Grown by Atomic Layer Molecular Beam Epitaxy Song, J.D., Park, Y.M, Shin, J.C., Lim, J.G., Park, Y.J., Choi, W.J., Han, I.K., Cho, W.J., Lee, J.I., Kim, H.S., Park, … Materials Research Society	12 国際会議録 Ultrafine Grained Dual Phase Steels Fabricated by Equal Channel Angular Pressing Shin, D.H., Kim, W.G., Ann, J.Y., Park, K.T., Kim, Y.S. Trans Tech Publications

1

2

3

4

5

6

7

8

9

10

11

12