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Molecular Dynamic Simulation of AFM-Based Nano Lithography Process for Fabrication of MEMS Components

著者名:
掲載資料名:
THERMEC '2003 : International Conference on Processing & Manufacturing of Advanced Materials, July 7-11, 2003, Leganés, Madrid, Spain
シリーズ名:
Materials science forum
シリーズ巻号:
426-432
発行年:
2003
パート:
3
開始ページ:
2243
終了ページ:
2248
総ページ数:
6
出版情報:
Zuerich-Uetikon, Switzerland: Trans Tech Publications
ISSN:
02555476
ISBN:
9780878499199 [0878499199]
言語:
英語
請求記号:
M23650
資料種別:
国際会議録

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